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[논문]Fully Depleted Ge CMOS Devices and Logic Circuits on Si - 과학기술 지식인프라 ScienceON (사이언스온....

We systematically studied Ge CMOS devices and logic circuits fabricated on a GeOI substrate, with the novel recessed channel and source/drain structures. Various channel lengths ( <TEX>$L_{\mathrm...

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Index Terms—CMOS, Ge, GeOI, logic circuits, MOSFET, recessed channel, recessed source/drain... [1],[5]. Compared with III–V compounds, Ge is quite promising for post-Si CMOS technology...

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